Tarrio, C.
, Fedynyshyn, T.
, Goodman, R.
, Cabral, A.
and Lucatorto, T.
(2010),
Polymer Photochemistry at the EUV Wavelength, Proc. SPIE, vol. 7639, San Jose, CA, [online], https://doi.org/10.1117/12.845997
(Accessed April 19, 2024)
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Polymer Photochemistry at the EUV Wavelength
Published
Author(s)
, Theodore Fedynyshyn, Russell Goodman, Alberto Cabral,
Proceedings Title
Proc. SPIE, vol. 7639
Conference Dates
January 17-21, 2010
Conference Location
San Jose, CA
Conference Title
Advances in Resist Materials and Processing Technology XXVII
Pub Type
Conferences
Download Paper
Keywords
EUV lithography, photoresist, polymer chemistry
Citation
Created June 8, 2010, Updated November 10, 2018