@conference{20826,
  author = {Charles Tarrio and Theodore Fedynyshyn and Russell Goodman and Alberto Cabral and Thomas Lucatorto},
  title = {Polymer Photochemistry at the EUV Wavelength},
  year = {2010},
  month = {2010-06-08},
  publisher = {Proc. SPIE, vol. 7639, San Jose, CA},
  doi = {https://doi.org/10.1117/12.845997},
  language = {en},
}