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Platinum-Palladium Thin-Film Thermocouples for Temperature Measurements on Silicon Wafers

Published

Author(s)

Kenneth G. Kreider, F DiMeo, F
Proceedings Title
5th International Conference on Advanced Thermal Processing of Semiconductors
Volume
5
Conference Dates
September 3-5, 1997
Conference Location
New Orleans, LA
Conference Title
Proceedings of the 5th International Conference on Advanced Thermal Processing of Semiconductors

Citation

Kreider, K. and DiMeo, F. (1997), Platinum-Palladium Thin-Film Thermocouples for Temperature Measurements on Silicon Wafers, 5th International Conference on Advanced Thermal Processing of Semiconductors, New Orleans, LA (Accessed June 22, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created September 3, 1997, Updated February 17, 2017