Kreider, K.
and DiMeo, F.
(1997),
Platinum-Palladium Thin-Film Thermocouples for Temperature Measurements on Silicon Wafers, 5th International Conference on Advanced Thermal Processing of Semiconductors, New Orleans, LA
(Accessed April 26, 2024)
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Platinum-Palladium Thin-Film Thermocouples for Temperature Measurements on Silicon Wafers
Published
Author(s)
, F DiMeo, F
Proceedings Title
5th International Conference on Advanced Thermal Processing of Semiconductors
Volume
5
Conference Dates
September 3-5, 1997
Conference Location
New Orleans, LA
Conference Title
Proceedings of the 5th International Conference on Advanced Thermal Processing of Semiconductors
Pub Type
Conferences
Citation
Created September 3, 1997, Updated February 17, 2017