TY  - CONF
AU  - Kenneth Kreider
AU  - F DiMeo
AU  - 
C2  - 5th International Conference on Advanced Thermal Processing of Semiconductors, New Orleans, LA
DA  - 1997-09-03
LA  - en
M1  - 5
PB  - 5th International Conference on Advanced Thermal Processing of Semiconductors, New Orleans, LA
PY  - 1997
TI  - Platinum-Palladium Thin-Film Thermocouples for Temperature Measurements on Silicon Wafers
ER  -