@conference{147226,
  author = {Kenneth Kreider and F DiMeo and },
  title = {Platinum-Palladium Thin-Film Thermocouples for Temperature Measurements on Silicon Wafers},
  year = {1997},
  number = {5},
  month = {1997-09-03},
  publisher = {5th International Conference on Advanced Thermal Processing of Semiconductors, New Orleans, LA},
  language = {en},
}