Buchler, M.
, David, J.
, Mattis, R.
, Phillips, W.
and Thurber, W.
(1976),
Planar test structures for characterizing impurities in silicon:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NBS.SP.400-21
(Accessed April 24, 2024)
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Planar test structures for characterizing impurities in silicon:
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Author(s)
, , , ,
Citation
- NBS SP 400-21
Report Number
NBS SP 400-21
Pub Type
NIST Pubs
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Citation
Created January 1, 1976, Updated May 19, 2023