Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Planar test structures for characterizing impurities in silicon:

Published

Author(s)

M G Buchler, J M David, R L Mattis, W E Phillips, W R Thurber
Citation
- NBS SP 400-21
Report Number
NBS SP 400-21

Citation

Buchler, M. , David, J. , Mattis, R. , Phillips, W. and Thurber, W. (1976), Planar test structures for characterizing impurities in silicon:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NBS.SP.400-21 (Accessed April 23, 2024)
Created January 1, 1976, Updated May 19, 2023