@misc{1161941,
  author = {M G Buchler and J M David and R L Mattis and W E Phillips and W R Thurber},
  title = {Planar test structures for characterizing impurities in silicon:},
  year = {1976},
  month = {1976-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NBS.SP.400-21},
  language = {en},
}