TY  - GEN
AU  - Buchler, M G
AU  - David, J M
AU  - Mattis, R L
AU  - Phillips, W E
AU  - Thurber, W R
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1976-01-01 05:01:00
DO  - https://doi.org/10.6028/NBS.SP.400-21
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1976
TI  - Planar test structures for characterizing impurities in silicon:
ER  -