TY  - GEN
AU  - M G Buchler
AU  - J M David
AU  - R L Mattis
AU  - W E Phillips
AU  - W R Thurber
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1976-01-01 05:01:00
DO  - https://doi.org/10.6028/NBS.SP.400-21
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1976
TI  - Planar test structures for characterizing impurities in silicon:
ER  -