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Particle tracking of microelectromechanical system performance and reliability

Published

Author(s)

Craig R. Copeland, Craig D. McGray, Jon C. Geist, Samuel M. Stavis

Abstract

Microelectromechanical systems (MEMS) that require contact of moving parts to implement complex functions have demonstrated critical limits of performance and reliability. Here, we advance a particle tracking method to measure MEMS motion in operando at nanometer, microradian, and millisecond scales. We test a torsional ratcheting actuator and observe dynamic behavior ranging from nearly perfect repeatability, to transient feedback and stiction, to terminal failure. This new measurement capability will help to understand and improve MEMS motion.
Citation
Journal of Microelectromechanical Systems
Volume
27
Issue
6

Keywords

fluorescence, MEMS, motion, reliability, stiction

Citation

Copeland, C. , McGray, C. , Geist, J. and Stavis, S. (2018), Particle tracking of microelectromechanical system performance and reliability, Journal of Microelectromechanical Systems, [online], https://doi.org/10.1109/JMEMS.2018.2874771 (Accessed May 20, 2022)
Created October 25, 2018, Updated December 4, 2018