@article{241621,
  author = {Craig Copeland and Craig McGray and Jon Geist and Samuel Stavis},
  title = {Particle tracking of microelectromechanical system performance and reliability},
  year = {2018},
  number = {27},
  month = {2018-10-25},
  publisher = {Journal of Microelectromechanical Systems},
  doi = {https://doi.org/10.1109/JMEMS.2018.2874771},
  language = {en},
}