TY  - JOUR
AU  - Craig Copeland
AU  - Craig McGray
AU  - Jon Geist
AU  - Samuel Stavis
C2  - Journal of Microelectromechanical Systems
DA  - 2018-10-25
DO  - https://doi.org/10.1109/JMEMS.2018.2874771
LA  - en
M1  - 27
PB  - Journal of Microelectromechanical Systems
PY  - 2018
TI  - Particle tracking of microelectromechanical system performance and reliability
ER  -