Copeland, C.
, McGray, C.
, Ilic, R.
, Geist, J.
and Stavis, S.
(2020),
Particle Tracking of a Complex Microsystem in Three Dimensions and Six Degrees of Freedom, 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS), Vancouver, CA, [online], https://doi.org/10.1109/MEMS46641.2020.9056241, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=929224
(Accessed September 18, 2024)
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Particle Tracking of a Complex Microsystem in Three Dimensions and Six Degrees of Freedom
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Abstract
We exploit the intrinsic aberrations of an optical microscope to track single particles in three dimensions. We combine information from multiple particles on a rigid body of a microelectromechanical system to measure its motion in six degrees of freedom. Our tracking method provides an extraordinary amount of information from an ordinary imaging system, revealing unintentional motion of the microsystem due to fabrication tolerance and nanoscale clearance between parts in sliding contact. Our work facilitates quantification and study of the actuation performance and reliability of complex microsystems.Proceedings Title
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)
Conference Dates
January 18-22, 2020
Conference Location
Vancouver, CA
Pub Type
Conferences
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Created January 18, 2020, Updated October 14, 2021