@conference{851541,
  author = {Craig Copeland and Craig McGray and Robert Ilic and Jon Geist and Samuel Stavis},
  title = {Particle Tracking of a Complex Microsystem in Three Dimensions and Six Degrees of Freedom},
  year = {2020},
  month = {2020-01-18 05:01:00},
  publisher = {2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS), Vancouver, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=929224},
  doi = {https://doi.org/10.1109/MEMS46641.2020.9056241},
  language = {en},
}