TY  - CONF
AU  - Craig Copeland
AU  - Craig McGray
AU  - Robert Ilic
AU  - Jon Geist
AU  - Samuel Stavis
C2  - 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS), Vancouver, CA
DA  - 2020-01-18 05:01:00
DO  - https://doi.org/10.1109/MEMS46641.2020.9056241
LA  - en
PB  - 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS), Vancouver, CA
PY  - 2020
TI  - Particle Tracking of a Complex Microsystem in Three Dimensions and Six Degrees of Freedom
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=929224
ER  -