Krause, S.
, Lee, J.
, Chen, B.
, Seraphin, S.
, Cordts, B.
and Roitman, P.
(1991),
Oxygen Bubble Formation and Evolution During Oxygen Implantation and Annealing of Silicon-on-Insulator Material, Extended Abstract, Proc., 49th Annual Meeting of the Electron Microscopy Society of America, San Diego, CA, USA
(Accessed April 26, 2024)
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Oxygen Bubble Formation and Evolution During Oxygen Implantation and Annealing of Silicon-on-Insulator Material
Published
Author(s)
S. J. Krause, J. H. Lee, B. L. Chen, S. Seraphin, B. F. Cordts,
Proceedings Title
Extended Abstract, Proc., 49th Annual Meeting of the Electron Microscopy Society of America
Conference Location
San Diego, CA, USA
Pub Type
Conferences
Citation
Created December 30, 1991, Updated October 12, 2021