U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

PUBLICATIONS

Oxygen Bubble Formation and Evolution During Oxygen Implantation and Annealing of Silicon-on-Insulator Material

Published

Author(s)

S. J. Krause, J. H. Lee, B. L. Chen, S. Seraphin, B. F. Cordts, Peter Roitman
Proceedings Title
Extended Abstract, Proc., 49th Annual Meeting of the Electron Microscopy Society of America
Conference Location
San Diego, CA, USA
Pub Type
Conferences

Citation

Krause, S. , Lee, J. , Chen, B. , Seraphin, S. , Cordts, B. and Roitman, P. (1991), Oxygen Bubble Formation and Evolution During Oxygen Implantation and Annealing of Silicon-on-Insulator Material, Extended Abstract, Proc., 49th Annual Meeting of the Electron Microscopy Society of America, San Diego, CA, USA (Accessed March 21, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created December 30, 1991, Updated October 12, 2021