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Oxygen Bubble Formation and Evolution During Oxygen Implantation and Annealing of Silicon-on-Insulator Material

Published

Author(s)

S. J. Krause, J. H. Lee, B. L. Chen, S. Seraphin, B. F. Cordts, Peter Roitman
Proceedings Title
Extended Abstract, Proc., 49th Annual Meeting of the Electron Microscopy Society of America
Conference Location
San Diego, CA, USA

Citation

Krause, S. , Lee, J. , Chen, B. , Seraphin, S. , Cordts, B. and Roitman, P. (1991), Oxygen Bubble Formation and Evolution During Oxygen Implantation and Annealing of Silicon-on-Insulator Material, Extended Abstract, Proc., 49th Annual Meeting of the Electron Microscopy Society of America, San Diego, CA, USA (Accessed July 25, 2024)

Issues

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Created December 30, 1991, Updated October 12, 2021