@conference{765826,
  author = {S. Krause and J. Lee and B. Chen and S. Seraphin and B. Cordts and Peter Roitman},
  title = {Oxygen Bubble Formation and Evolution During Oxygen Implantation and Annealing of Silicon-on-Insulator Material},
  year = {1991},
  month = {1991-12-31 00:12:00},
  publisher = {Extended Abstract, Proc., 49th Annual Meeting of the Electron Microscopy Society of America, San Diego, CA, USA},
  language = {en},
}