TY  - CONF
AU  - S. Krause
AU  - J. Lee
AU  - B. Chen
AU  - S. Seraphin
AU  - B. Cordts
AU  - Peter Roitman
C2  - Extended Abstract, Proc., 49th Annual Meeting of the Electron Microscopy Society of America, San Diego, CA, USA
DA  - 1991-12-31 00:12:00
LA  - en
PB  - Extended Abstract, Proc., 49th Annual Meeting of the Electron Microscopy Society of America, San Diego, CA, USA
PY  - 1991
TI  - Oxygen Bubble Formation and Evolution During Oxygen Implantation and Annealing of Silicon-on-Insulator Material
ER  -