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The Oxidation of Deuterium-, Acetylene- and Ethylene-Terminated Si (100) by Atomic Oxygen

Published

Author(s)

Maritoni A. Litorja, S A. Buntin
Citation
J Vac Sci and Tech A
Volume
20

Citation

Litorja, M. and Buntin, S. (2002), The Oxidation of Deuterium-, Acetylene- and Ethylene-Terminated Si (100) by Atomic Oxygen, J Vac Sci and Tech A (Accessed June 16, 2024)

Issues

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Created January 1, 2002, Updated February 17, 2017