Litorja, M.
and Buntin, S.
(2002),
The Oxidation of Deuterium-, Acetylene- and Ethylene-Terminated Si (100) by Atomic Oxygen, J Vac Sci and Tech A
(Accessed November 28, 2023)
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The Oxidation of Deuterium-, Acetylene- and Ethylene-Terminated Si (100) by Atomic Oxygen
Published
Author(s)
, S A. Buntin
Citation
J Vac Sci and Tech A
Volume
20
Pub Type
Journals
Citation
Created January 1, 2002, Updated February 17, 2017