@article{127771,
  author = {Maritoni Litorja and S Buntin},
  title = {The Oxidation of Deuterium-, Acetylene- and Ethylene-Terminated Si (100) by Atomic Oxygen},
  year = {2002},
  number = {20},
  month = {2002-01-01},
  publisher = {J Vac Sci and Tech A},
  language = {en},
}