TY  - JOUR
AU  - Maritoni Litorja
AU  - S Buntin
C2  - J Vac Sci and Tech A
DA  - 2002-01-01
LA  - en
M1  - 20
PB  - J Vac Sci and Tech A
PY  - 2002
TI  - The Oxidation of Deuterium-, Acetylene- and Ethylene-Terminated Si (100) by Atomic Oxygen
ER  -