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Optimization of ECR-Based PECVD Oxide Films for Superconducting Integrated Circuit Fabrication

Published

Author(s)

J. E. Sauvageau, Charles J. Burroughs, M. W. Cromar, Jonathan A. Koch
Proceedings Title
Proc., 37th Annual Tech. Conf. Society of Vacuum Coaters
Conference Dates
May 8-13, 2094
Conference Location
Boston, MA, USA

Citation

Sauvageau, J. , Burroughs, C. , Cromar, M. and Koch, J. (1994), Optimization of ECR-Based PECVD Oxide Films for Superconducting Integrated Circuit Fabrication, Proc., 37th Annual Tech. Conf. Society of Vacuum Coaters, Boston, MA, USA (Accessed March 2, 2024)
Created December 30, 1994, Updated October 12, 2021