Sauvageau, J.
, Burroughs, C.
, Cromar, M.
and Koch, J.
(1994),
Optimization of ECR-Based PECVD Oxide Films for Superconducting Integrated Circuit Fabrication, Proc., 37th Annual Tech. Conf. Society of Vacuum Coaters, Boston, MA, USA
(Accessed March 13, 2025)
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Optimization of ECR-Based PECVD Oxide Films for Superconducting Integrated Circuit Fabrication
Published
Author(s)
J. E. Sauvageau, , M. W. Cromar,
Proceedings Title
Proc., 37th Annual Tech. Conf. Society of Vacuum Coaters
Conference Dates
May 8-13, 2094
Conference Location
Boston, MA, USA
Pub Type
Conferences
Citation
Issues
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Created December 30, 1994, Updated October 12, 2021