TY  - CONF
AU  - J. Sauvageau
AU  - Charles Burroughs
AU  - M. Cromar
AU  - Jonathan Koch
C2  - Proc., 37th Annual Tech. Conf. Society of Vacuum Coaters, Boston, MA, USA
DA  - 1994-12-31 00:12:00
LA  - en
PB  - Proc., 37th Annual Tech. Conf. Society of Vacuum Coaters, Boston, MA, USA
PY  - 1994
TI  - Optimization of ECR-Based PECVD Oxide Films for Superconducting Integrated Circuit Fabrication
ER  -