@conference{761616, author = {J. Sauvageau and Charles Burroughs and M. Cromar and Jonathan Koch}, title = {Optimization of ECR-Based PECVD Oxide Films for Superconducting Integrated Circuit Fabrication}, year = {1994}, month = {1994-12-31 00:12:00}, publisher = {Proc., 37th Annual Tech. Conf. Society of Vacuum Coaters, Boston, MA, USA}, language = {en}, }