Nyyssonen, D.
and Kirk, C.
(1988),
Optical Microscope Imaging of Lines Patterned in Thick Layers with Variable Edge Geometry: Theory, J. Opt. Soc. America
(Accessed September 22, 2023)
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Optical Microscope Imaging of Lines Patterned in Thick Layers with Variable Edge Geometry: Theory
Published
Author(s)
D. Nyyssonen, C. Kirk
Citation
J. Opt. Soc. America
Volume
5
Pub Type
Journals
Citation
Created December 30, 1988, Updated October 12, 2021