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Optical Microscope Imaging of Lines Patterned in Thick Layers with Variable Edge Geometry: Theory

Published

Author(s)

D. Nyyssonen, C. Kirk
Citation
J. Opt. Soc. America
Volume
5

Citation

Nyyssonen, D. and Kirk, C. (1988), Optical Microscope Imaging of Lines Patterned in Thick Layers with Variable Edge Geometry: Theory, J. Opt. Soc. America (Accessed April 19, 2024)
Created December 30, 1988, Updated October 12, 2021