TY - JOUR AU - D. Nyyssonen AU - C. Kirk C2 - J. Opt. Soc. America DA - 1988-12-31 00:12:00 LA - en M1 - 5 PB - J. Opt. Soc. America PY - 1988 TI - Optical Microscope Imaging of Lines Patterned in Thick Layers with Variable Edge Geometry: Theory ER -