@article{766866,
  author = {D. Nyyssonen and C. Kirk},
  title = {Optical Microscope Imaging of Lines Patterned in Thick Layers with Variable Edge Geometry: Theory},
  year = {1988},
  number = {5},
  month = {1988-12-31 00:12:00},
  publisher = {J. Opt. Soc. America},
  language = {en},
}