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Optical Constants of In-Situ Deposited Films of Important EUV Multilayer Materials,

Published

Author(s)

Charles S. Tarrio, R N. Watts, Thomas B. Lucatorto, J M. Slaughter, C M. Falco
Citation
Applied Optics
Volume
37

Citation

Tarrio, C. , Watts, R. , Lucatorto, T. , Slaughter, J. and Falco, C. (1998), Optical Constants of In-Situ Deposited Films of Important EUV Multilayer Materials,, Applied Optics (Accessed May 25, 2024)

Issues

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Created January 1, 1998, Updated February 17, 2017