Tarrio, C.
, Watts, R.
, Lucatorto, T.
, Slaughter, J.
and Falco, C.
(1998),
Optical Constants of In-Situ Deposited Films of Important EUV Multilayer Materials,, Applied Optics
(Accessed December 2, 2023)
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Optical Constants of In-Situ Deposited Films of Important EUV Multilayer Materials,
Published
Author(s)
, , , J M. Slaughter, C M. Falco
Citation
Applied Optics
Volume
37
Pub Type
Journals
Citation
Created January 1, 1998, Updated February 17, 2017