@article{144691,
  author = {Charles Tarrio and R Watts and Thomas Lucatorto and J Slaughter and C Falco},
  title = {Optical Constants of In-Situ Deposited Films of Important EUV Multilayer Materials,},
  year = {1998},
  number = {37},
  month = {1998-01-01},
  publisher = {Applied Optics},
  language = {en},
}