TY  - JOUR
AU  - Charles Tarrio
AU  - R Watts
AU  - Thomas Lucatorto
AU  - J Slaughter
AU  - C Falco
C2  - Applied Optics
DA  - 1998-01-01
LA  - en
M1  - 37
PB  - Applied Optics
PY  - 1998
TI  - Optical Constants of In-Situ Deposited Films of Important EUV Multilayer Materials,
ER  -