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Optical Characterization in Microelectronics Manufacturing



S. Perkowitz, David G. Seiler, William Duncan
Journal of Research (NIST JRES) -


Perkowitz, S. , Seiler, D. and Duncan, W. (1994), Optical Characterization in Microelectronics Manufacturing, Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD, [online], (Accessed May 28, 2024)


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Created August 31, 1994, Updated October 12, 2021