Perkowitz, S.
, Seiler, D.
and Duncan, W.
(1994),
Optical Characterization in Microelectronics Manufacturing, Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=5728
(Accessed October 6, 2024)
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Optical Characterization in Microelectronics Manufacturing
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S. Perkowitz, ,
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Journal of Research (NIST JRES) -
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Created August 31, 1994, Updated October 12, 2021