TY  - GEN
AU  - S. Perkowitz
AU  - David Seiler
AU  - William Duncan
C2  - Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1994-09-01 00:09:00
LA  - en
PB  - Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1994
TI  - Optical Characterization in Microelectronics Manufacturing
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=5728
ER  -