Perkowitz, S.
, Seiler, D.
and Bullis, W.
(1995),
Optical Characterization of Materials and Devices for the Semiconductor Industry: Trends and Needs, Semiconductor Characterization - Present Status and Future Needs, Gaithersburg, MD, USA
(Accessed December 15, 2024)
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Optical Characterization of Materials and Devices for the Semiconductor Industry: Trends and Needs
Published
Author(s)
S. Perkowitz, , W M. Bullis
Proceedings Title
Semiconductor Characterization - Present Status and Future Needs
Conference Location
Gaithersburg, MD, USA
Pub Type
Conferences
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created December 30, 1995, Updated October 12, 2021