Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Optical Characterization of Materials and Devices for the Semiconductor Industry: Trends and Needs

Published

Author(s)

S. Perkowitz, David G. Seiler, W M. Bullis
Proceedings Title
Semiconductor Characterization - Present Status and Future Needs
Conference Location
Gaithersburg, MD, USA

Citation

Perkowitz, S. , Seiler, D. and Bullis, W. (1995), Optical Characterization of Materials and Devices for the Semiconductor Industry: Trends and Needs, Semiconductor Characterization - Present Status and Future Needs, Gaithersburg, MD, USA (Accessed April 18, 2024)
Created December 30, 1995, Updated October 12, 2021