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PUBLICATIONS

Optical Characterization of Materials and Devices for the Semiconductor Industry: Trends and Needs

Published

Author(s)

S. Perkowitz, David G. Seiler, W M. Bullis
Proceedings Title
Semiconductor Characterization - Present Status and Future Needs
Conference Location
Gaithersburg, MD, USA
Pub Type
Conferences

Citation

Perkowitz, S. , Seiler, D. and Bullis, W. (1995), Optical Characterization of Materials and Devices for the Semiconductor Industry: Trends and Needs, Semiconductor Characterization - Present Status and Future Needs, Gaithersburg, MD, USA (Accessed October 4, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created December 30, 1995, Updated October 12, 2021
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