TY  - CONF
AU  - S. Perkowitz
AU  - David Seiler
AU  - W Bullis
C2  - Semiconductor Characterization -  Present Status and Future Needs, Gaithersburg, MD, USA
DA  - 1995-12-31 00:12:00
LA  - en
PB  - Semiconductor Characterization -  Present Status and Future Needs, Gaithersburg, MD, USA
PY  - 1995
TI  - Optical Characterization of Materials and Devices for the Semiconductor Industry: Trends and Needs
ER  -