@conference{765286,
  author = {S. Perkowitz and David Seiler and W Bullis},
  title = {Optical Characterization of Materials and Devices for the Semiconductor Industry: Trends and Needs},
  year = {1995},
  month = {1995-12-31 00:12:00},
  publisher = {Semiconductor Characterization -  Present Status and Future Needs, Gaithersburg, MD, USA},
  language = {en},
}