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Optical and Mass Spectrometric Investigations of Ions and Neutral Species in SF6 Radio-Frequency Discharges

Published

Author(s)

R Foest, James K. Olthoff, R J. Van brunt, Eric C. Benck, J R. Roberts
Citation
Physical Review E (Statistical, Nonlinear, and Soft Matter Physics)
Volume
54
Issue
2

Citation

Foest, R. , Olthoff, J. , Van brunt, R. , Benck, E. and Roberts, J. (1996), Optical and Mass Spectrometric Investigations of Ions and Neutral Species in SF<sub>6</sub> Radio-Frequency Discharges, Physical Review E (Statistical, Nonlinear, and Soft Matter Physics) (Accessed July 19, 2024)

Issues

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Created December 31, 1995, Updated October 12, 2021