@article{813996,
  author = {R Foest and James Olthoff and R Van brunt and Eric Benck and J Roberts},
  title = {Optical and Mass Spectrometric Investigations of Ions and Neutral Species in SF<sub>6</sub> Radio-Frequency Discharges},
  year = {1996},
  number = {54},
  month = {1996-01-01 00:01:00},
  publisher = {Physical Review E (Statistical, Nonlinear, and Soft Matter Physics)},
  language = {en},
}