TY  - JOUR
AU  - R Foest
AU  - James Olthoff
AU  - R Van brunt
AU  - Eric Benck
AU  - J Roberts
C2  - Physical Review E (Statistical, Nonlinear, and Soft Matter Physics)
DA  - 1996-01-01 00:01:00
LA  - en
M1  - 54
PB  - Physical Review E (Statistical, Nonlinear, and Soft Matter Physics)
PY  - 1996
TI  - Optical and Mass Spectrometric Investigations of Ions and Neutral Species in SF<sub>6</sub> Radio-Frequency Discharges
ER  -