Foest, R.
, Olthoff, J.
, Van Brunt, R.
, Benck, E.
and Roberts, J.
(1996),
Optical and Mass Spectrometric Investigations of Ions and Neutral Species in SF6 Radio-Frequency Discharges, Physical Review E (Statistical, Nonlinear, and Soft Matter Physics), [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=18850
(Accessed October 6, 2024)
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Optical and Mass Spectrometric Investigations of Ions and Neutral Species in SF6 Radio-Frequency Discharges
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Author(s)
R Foest, , , ,
Citation
Physical Review E (Statistical, Nonlinear, and Soft Matter Physics)
Issue
2
Pub Type
Journals
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If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created July 31, 1996, Updated October 12, 2021