TY  - JOUR
AU  - R Foest
AU  - James Olthoff
AU  - Richard Van Brunt
AU  - Eric Benck
AU  - J Roberts
C2  - Physical Review E (Statistical, Nonlinear, and Soft Matter Physics)
DA  - 1996-08-01 00:08:00
LA  - en
PB  - Physical Review E (Statistical, Nonlinear, and Soft Matter Physics)
PY  - 1996
TI  - Optical and Mass Spectrometric Investigations of Ions and Neutral Species in SF6 Radio-Frequency Discharges
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=18850
ER  -