@article{762191, author = {R Foest and James Olthoff and Richard Van Brunt and Eric Benck and J Roberts}, title = {Optical and Mass Spectrometric Investigations of Ions and Neutral Species in SF6 Radio-Frequency Discharges}, year = {1996}, month = {1996-08-01 00:08:00}, publisher = {Physical Review E (Statistical, Nonlinear, and Soft Matter Physics)}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=18850}, language = {en}, }