Jerke, J.
(1975),
Optical and dimensional-measurement problems with photomasking in microelectronics:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NBS.SP.400-20
(Accessed December 9, 2024)
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Optical and dimensional-measurement problems with photomasking in microelectronics:
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- NBS SP 400-20
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NBS SP 400-20
Pub Type
NIST Pubs
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Created January 1, 1975, Updated May 19, 2023