@misc{1161946,
  author = {John M Jerke},
  title = {Optical and dimensional-measurement problems with photomasking in microelectronics:},
  year = {1975},
  month = {1975-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NBS.SP.400-20},
  language = {en},
}