Hartman, A.
, Rosberry, F.
and Simpson, J.
(1973),
A non-contacting length comparator with 10 nanometer precision:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NBS.IR.73-104
(Accessed December 11, 2024)
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A non-contacting length comparator with 10 nanometer precision:
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- NBS IR 73-104
Report Number
NBS IR 73-104
Pub Type
NIST Pubs
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Created January 1, 1973, Updated May 19, 2023