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A non-contacting length comparator with 10 nanometer precision:

Published

Author(s)

A W Hartman, F W Rosberry, J Arol Simpson
Citation
- NBS IR 73-104
Report Number
NBS IR 73-104

Citation

Hartman, A. , Rosberry, F. and Simpson, J. (1973), A non-contacting length comparator with 10 nanometer precision:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NBS.IR.73-104 (Accessed March 3, 2024)
Created January 1, 1973, Updated May 19, 2023