@misc{1190471,
  author = {A W Hartman and F W Rosberry and J Arol Simpson},
  title = {A non-contacting length comparator with 10 nanometer precision:},
  year = {1973},
  month = {1973-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NBS.IR.73-104},
  language = {en},
}