TY  - GEN
AU  - A W Hartman
AU  - F W Rosberry
AU  - J Arol Simpson
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1973-01-01 05:01:00
DO  - https://doi.org/10.6028/NBS.IR.73-104
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1973
TI  - A non-contacting length comparator with 10 nanometer precision:
ER  -