Villarrubia, J.
(2011),
NIST Simulation of E-beam Inspection and CD-SEM in-line metrology: Final Report, ISMI, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=907582, http://ismi.sematech.org
(Accessed December 12, 2024)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
NIST Simulation of E-beam Inspection and CD-SEM in-line metrology: Final Report
Published
Author(s)
Abstract
This report summarizes results from a two-year project to develop a simulator for electron beam inspection and critical dimension scanning electron microscope (SEM) inline metrology tools. The development attempts to improve on prior simulators and develop a tool that can be used to explore the fundamental limits of e-beam instruments for imaging and measuring small features. The work covered by this report includes improvements to the secondary electron generation model, assembly of a database of the material properties and computation of scattering tables required for use of the improved model, improvements to simulation algorithms for non-conducting materials, and the addition of a capability to model the effects of charging in insulating samples. (61 references)Citation
ISMI
Pub Weblink
Pub Type
Websites
Download Paper
Keywords
e-beam, charging, critical dimension, modeling, simulation
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created January 1, 2011, Updated February 19, 2017