Villarrubia, J.
(2011),
NIST Simulation of E-beam Inspection and CD-SEM in-line metrology: Final Report, ISMI, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=907582, http://ismi.sematech.org (Accessed May 2, 2026)
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NIST Simulation of E-beam Inspection and CD-SEM in-line metrology: Final Report
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Abstract
This report summarizes results from a two-year project to develop a simulator for electron beam inspection and critical dimension scanning electron microscope (SEM) inline metrology tools. The development attempts to improve on prior simulators and develop a tool that can be used to explore the fundamental limits of e-beam instruments for imaging and measuring small features. The work covered by this report includes improvements to the secondary electron generation model, assembly of a database of the material properties and computation of scattering tables required for use of the improved model, improvements to simulation algorithms for non-conducting materials, and the addition of a capability to model the effects of charging in insulating samples. (61 references)Citation
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Keywords
e-beam, charging, critical dimension, modeling, simulation
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Created January 1, 2011, Updated February 19, 2017