Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

NIST Simulation of E-beam Inspection and CD-SEM in-line metrology: Final Report



John S. Villarrubia


This report summarizes results from a two-year project to develop a simulator for electron beam inspection and critical dimension scanning electron microscope (SEM) inline metrology tools. The development attempts to improve on prior simulators and develop a tool that can be used to explore the fundamental limits of e-beam instruments for imaging and measuring small features. The work covered by this report includes improvements to the secondary electron generation model, assembly of a database of the material properties and computation of scattering tables required for use of the improved model, improvements to simulation algorithms for non-conducting materials, and the addition of a capability to model the effects of charging in insulating samples. (61 references)


e-beam, charging, critical dimension, modeling, simulation


Villarrubia, J. (2011), NIST Simulation of E-beam Inspection and CD-SEM in-line metrology: Final Report, ISMI, [online],, (Accessed April 17, 2024)
Created January 1, 2011, Updated February 19, 2017