TY  - ICOMM
AU  - John Villarrubia
C1  - http://ismi.sematech.org
C2  - ISMI
DA  - 2011-01-01
LA  - en
PB  - ISMI
PY  - 2011
TI  - NIST Simulation of E-beam Inspection and CD-SEM in-line metrology: Final Report
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=907582
ER  -