@misc{10131,
  author = {John Villarrubia},
  title = {NIST Simulation of E-beam Inspection and CD-SEM in-line metrology: Final Report},
  year = {2011},
  month = {2011-01-01},
  publisher = {ISMI},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=907582},
  language = {en},
}