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NIST List of Publications LP 103, National Semiconductor Metrology Program and Semiconductor Electronics Division

Published

Author(s)

E. J. Walters

Abstract

This List of Publications includes all papers relevant to semiconductor technology published by NIST staff, including work of the National Semiconductor Metrology Program, The Semiconductor Electronics Division, and other parts of NIST having independent interests in semiconductor metrology. Bibliographic information is provided for publications from 1990 through 1997.
Citation
Special Publication (NIST SP) - 103 98 ED
Report Number
103 98 ED

Keywords

semiconductors, metrology, semiconductor technology, National Semiconductor Metrology Program, NIST Semiconductor Electronics Division

Citation

Walters, E. (1999), NIST List of Publications LP 103, National Semiconductor Metrology Program and Semiconductor Electronics Division, Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD (Accessed March 1, 2024)
Created April 20, 1999, Updated October 12, 2021