TY  - GEN
AU  - Walters, E.
C2  - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1999-04-21 00:04:00
LA  - en
PB  - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1999
TI  - NIST List of Publications LP 103, National Semiconductor Metrology Program and Semiconductor Electronics Division
ER  -